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介绍了一种用压电柱作为定子的微型超声电机.这种超声微电机的直径1mm,长5mm,重量36mg.一端固定的电机其共振频率是32kHz,两端自由的是83kHz.在压电柱的表面均匀分割出四个电极,电极的间隔经过了优化设计.采用弯曲振动模式,该电机转速1800r/min,堵转力炬达到4μN·m,能承受350V_(pp)的驱动电压.该电机已用于OCT内窥镜样机中,驱动一个光学棱镜进行环向扫描,得到了塑料管和葱管内部的层析成像图,并且得到微米数量级的分辨率.
A miniature ultrasonic motor with a piezoelectric column as a stator is introduced. The diameter of the ultrasonic micro-motor is 1 mm, a length of 5 mm and a weight of 36 mg. The motor with one end fixed has a resonance frequency of 32 kHz and a free end of 83 kHz. The surface of the column is evenly divided into four electrodes, and the interval of the electrodes is optimized. The flexural vibration mode is adopted, the motor speed is 1800r / min, the torque is 4μN · m, and the drive voltage can withstand 350V pp. The motor has been used in the OCT endoscope prototype, which drives an optical prism to scan in the circumferential direction, resulting in a tomographic image of the interior of the plastic tube and onions, with micrometer resolution.