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以Pb(NO3)2、TiCl3和ZrOCl2为电解质,就利用电化学还原法及退火晶化处理在不锈钢基底上制备钙钛矿型PZT薄膜进行了研究。结果表明:在一定条件下,淀积在基底上的膜层,其组份比与电解液的组份摩尔浓度、还原电流密度和还原时间存在某种确定的关系。通过调整电解液中组份的摩尔浓度,选择合适的还原电流密度和还原时间,可以控制膜层的组份比,再经过退火处理制备出所需化学配比的钙钛矿结构PZT薄膜。
The Pb (NO3) 2, TiCl3 and ZrOCl2 electrolytes were used to prepare perovskite PZT thin films on stainless steel substrates by electrochemical reduction and annealing. The results show that under certain conditions, the compositional ratio of the film deposited on the substrate has certain relationship with the molar concentration of the electrolyte, the reduction current density and the reduction time. By adjusting the molar concentration of the components in the electrolyte and selecting the appropriate reduction current density and reduction time, the composition ratio of the film can be controlled, and then annealed to prepare the PZT film with the desired stoichiometry.