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亚微米微位移机构是现代精密机械与精密仪器的共同基础。近年来随着科学技术的发展,尤其是微电子技术的飞跃进步,将精密机械与精密仪器的精度提高了一个数量级,即由微米级的精度提高到亚微米级,因此作为精度补偿及微调机构的亚微米微位移技术,得到了迅速的发展和广泛地应用。目前亚微米微位移技术日趋成熟,实现亚微米微位移的方法很多,本文着重讨论电磁驱动原理,位移机构设计中的问题以及利用该原理设计研制的亚微米微位移机构的实验结果。 电磁驱动原理
Submicron micro-displacement mechanism is the common basis of modern precision machinery and precision instruments. In recent years, with the development of science and technology, especially the leap advancement of microelectronic technology, the precision of precision machinery and precision instruments has been improved by one order of magnitude, that is, the accuracy of micron level has been increased to submicron level. Therefore, as the precision compensation and fine adjustment mechanism Submicron micro-displacement technology, has been rapidly developed and widely used. At present, submicron micro-displacement technology is maturing and there are many ways to achieve submicron micro-displacement. This article focuses on the principle of electromagnetic drive, the design of displacement mechanism and the experimental results of submicrometer micro-displacement mechanism designed by this principle. Electromagnetic drive principle