马赫-泽德干涉仪(MZI)是一种重要的光学和光子学器件,广泛应用于干涉计量、光通信等领域。基于干涉仪对波导及其周围介质折射率的相位敏感特性,MZI被广泛用作传感器和光调制器。最近,我们通过光学显微镜下的微纳操作,在低折射率衬底上分别用氧化硅和碲酸盐玻璃微纳光纤成功研制了微纳光纤MZI。通过高温拉伸光纤法,我们制备得到两根直径约1μm、 Mach Zehnder Interferometer (MZI) is an important optical and photonic devices, widely used in interferometry, optical communications and other fields. Based on the phase-sensitive properties of the interferometer to the refractive index of the waveguide and its surrounding medium, MZI is widely used as a sensor and an optical modulator. Recently, we successfully developed the micro / nano-fiber MZI with silica and tellurite glass micro-nano fibers on a low refractive index substrate by micro-nano manipulation under a light microscope. Through the high-temperature drawing optical fiber method, we prepared two diameter of about 1μm,