对不同离子束密度条件下辅助沉积的ZnS薄膜进行了物理及光学特性研究。研究结果表明,在离子束辅助沉积ZnS薄膜时会出现非均匀生长现象,且非均匀性和折射率会随着离子束密度的增加而增大,薄膜结晶程度也增加。薄膜的非均匀性增加了薄膜制备和设计的难度,尤其是对多层膜系的制备造成了很大的不确定性。研究结果为红外光学ZnS薄膜的研制提供了重要参考。 The physical and optical properties of ZnS films deposited under different ion beam densities were studied. The results show that the non-uniform growth of ZnS films can be observed when ion beam assisted deposition, and the nonuniformity and refractive index increase with the increase of ion beam density, and the crystallinity of the films also increases. Film non-uniformity increases the difficulty of film preparation and design, especially for the preparation of multi-layer film system caused a great deal of uncertainty. The results provide an important reference for the development of infrared optical ZnS films.