一概述在高精度的机械机构中,旋转部件的回转均匀性的要求比较高,进给部件也如此,尤其在微量进给系统中要求更高。例如,我所研制的《微进绐系统及精密轴系》,其主轴回转速度的均匀性达到<10~(-4)转,其进给系统的进给量精度<±0.2微米。对如此高的精度检测,目前国内尚无适用的测量仪器,为此,我们研制了恒转速及微进给精度检测仪。 General Description In high-precision mechanical mechanisms, the requirement for rotational uniformity of rotating parts is relatively high, as are feeding parts, especially in micro-feed systems. For example, the “micro-precision 轴 system and precision shaft system” developed by our company has a spindle rotation speed uniformity of <10 ~ (-4) rpm and feed system accuracy of <± 0.2 μm. For such a high degree of accuracy testing, at present there is no applicable measuring instruments, for which we have developed a constant speed and micro feed accuracy detector.