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用CW CO_2激光器以不同功率不同时间辐照不同压力不同配比的CFCl_2(F_(12))和SF_6混合物,产物经红外光谱和气相色谱分析确定主要是C_2F_4Cl_2(F_(114))、CF_3Cl(F_(13))和Cl_2。加入的SF_6在反应后未起变化。激光功率、辐照时间和F_(12)压力恒定时,反应物的吸收系数及F_(12)的分解分数随SF_6压力的增高而剧烈增加:在较低压力下F_(12)的分解分数随SF_6量增加呈线性增加,在较高压力下呈指数增加。在保持其它条件恒定时,可发现F_(12)的分解分数与入射光功率成正比,且存在一能量阈值;分解分数还随F_(12)的压力增加以及随辐照时间的增加而增加。
Different mixtures of CFCl_2 (F_ (12)) and SF_6 with different pressures and different pressures were irradiated by CW CO_2 laser at different times. The products were identified as F_ (114) and F_ (114) by FTIR and gas chromatography. (13)) and Cl_2. The added SF_6 did not change after the reaction. When the laser power, the irradiation time and the pressure of F 12 were constant, the absorption coefficient of F 12 and the decomposition fraction of F 12 increased sharply with the increase of SF 6 pressure. The decomposition fraction of F 12 with lower pressure The amount of SF 6 increased linearly and increased exponentially under higher pressure. While keeping other conditions constant, it can be found that the decomposition fraction of F_ (12) is proportional to the incident light power, and there exists an energy threshold. The decomposition fraction also increases with the increase of pressure of F_ (12) and with the increase of irradiation time.