当今最重要的电子材料是半导体单晶硅,用它不但可制做各种二极管、三极管还可将成千上万个元件集成在一个小硅片上.从大型计算机到家用电器、儿童玩具,其核心部分都是用单晶硅做的集成电路.市场上需求多少半导体集成电路已经成为一个国家现代化水平的标志.单晶硅器件技术的发展一方面是不断提高单位芯片上的元件集成度,另一方面是向薄膜器件的新领域开拓.特别是在七十年代分子束外延技术出现以后,制做原子尺度的单晶薄膜已成现实.但分子束外延设备昂贵,而且薄膜器件仍需做在单晶 Today’s most important electronic materials are semiconductor single crystal silicon, not only can it be used to make a variety of diodes, transistors can also be thousands of components integrated in a small silicon. From large computers to household appliances, children’s toys, its The core part is made of monocrystalline silicon integrated circuits.More market demand for semiconductor integrated circuits has become a national symbol of the level of modernization.On the one hand, the development of single crystal silicon device technology is to continuously improve the unit chip integrated level, and the other On the one hand, it is open to new fields of thin film devices, especially after the emergence of molecular beam epitaxy in the seventies, the fabrication of single-crystal thin films with atomic scale has become a reality.But the molecular beam epitaxy equipment is expensive and thin film devices still need to be Single crystal