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本文对牵引分子泵抽气机理进行了深入分析,考虑了通道返流和工作间隙泄漏对泵抽气性能的影响。采用有限差分法对通道内气体分子宏观运动速度分布进行了计算,提 出了牵引分子泵二维抽气理论。
In this paper, the pumping molecular mechanism of traction molecular pump is deeply analyzed, and the influence of channel backflow and working clearance leakage on pumping performance is considered. Finite difference method was used to calculate the macroscopic velocity distribution of gas molecules in the channel, and a two-dimensional drawing theory was proposed.