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报道了几种腐蚀InP(100)面位错的新的化学腐蚀剂:HBr,HCl:HBr及 H_2SO_4:HBr.腐蚀坑的形状为倒锥形.将以上几种新腐蚀剂在InP(100)面上的腐蚀坑分别与Huber腐蚀剂的位错腐蚀坑作了比较.
Several new chemical etchants have been reported for etching InP (100) plane dislocations: HBr, HCl: HBr and H_2SO_4: HBr.The shapes of the corrosion pits are inverted conicals.The above new etchants are deposited on the InP (100) Of the corrosion pit and Huber etchant dislocation corrosion pit were compared.