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通过射频磁控溅射法制备了系列Ti Al CN涂层。研究结果表明,通过调节溅射过程中N2流量,Ti Al CN涂层的组成和结构均发生明显变化。很小的N2流量会导致Ti Al CN涂层的晶体结构发生显著变化。随着N2流量的增加,涂层物相组成由fcc-(Ti Al)C相转变为更为复杂的fcc-(Ti Al)(CN)相,同时析出hcp-(Al Ti)(CN)新相。N2流量的进一步增加使得涂层物相最终转变为以hcp-(Al Ti)(CN)为主导的相结构。此外,N2流量还会促进涂层中非晶碳的析出。N2流量为0.5 m L/min时,Ti Al CN涂层由于多相共存,晶粒显著细化,尺寸约为10~20 nm,此时涂层具有较好的力学性能和摩擦学性能。
A series of TiAlCN coatings were prepared by RF magnetron sputtering. The results show that the composition and structure of the TiAlCN coatings change significantly by adjusting the N2 flow rate during sputtering. A small N2 flow results in a significant change in the crystal structure of the TiAlCN coating. With the increase of N2 flow rate, the phase composition of coating changes from fcc- (TiAl) C phase to the more complex fcc- (TiAl) (CN) phase while precipitating hcp- (AlTi) (CN) phase. A further increase of N2 flow causes the coating phase to finally transform into a phase structure dominated by hcp- (Al Ti) (CN). In addition, N2 flow will also promote the precipitation of amorphous carbon in the coating. When the flow rate of N2 is 0.5 m L / min, the TiAl CN coating coexists in multiphase, and the grain size is obviously refined with the size of about 10-20 nm. At this time, the coating has good mechanical properties and tribological properties.