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本文概述了低温微电子学的研究与发展状况。低温将为微电子器件、电路和系统提供优化的工作环境,并极大地提高了器件、电路和系统的性能。高温超导薄膜技术的进展导致了超导/半导兼容电子学的勃起。可以相信.低温微电子器件、电路和系统以其具有的高速低功耗高可靠的特性,为 GSI 1C、超级计算机、空间和宇宙电子学、红外探测器等的发展所必需。
This article outlines the research and development of low temperature microelectronics. Cryogenic temperatures will provide an optimized working environment for microelectronic devices, circuits and systems and greatly improve the performance of devices, circuits and systems. Advances in high temperature superconducting thin film technology have led to the erection of superconducting / semiconducting electronics. It is believed that low temperature microelectronic devices, circuits and systems are necessary for the development of GSI 1C, supercomputers, space and space electronics, infrared detectors, etc., with their high speed, low power and high reliability.