固态片状扩散源有扩散均匀性,重复性好,操作简便,装炉量大等优点,一直为人们所向往,但六十年代,未找到合适的片状磷源材料,至1972年,日本首先发表了片状氮化磷源专利,但由于有热稳定性差等原因,在满足半导体器件和集成电路要求方面不甚理想,因而受到限制,直至1976年美国NJones等报导了PH-1050片状磷源,其所得结果可与pocl3液态 Solid-state flake diffusion source has the advantages of diffusion uniformity, good repeatability, easy operation, large capacity of loading, and so on, which has long been sought after by people. However, in the 1960s, no suitable flaky phosphorus source material was found. By 1972, Japan First of all, it published the patent of flake phosphorus nitride source, but it was limited because it had poor thermal stability and was not satisfactory in meeting the requirements of semiconductor devices and integrated circuits. Until 1976, NJONE et al. Reported that PH-1050 flake Phosphorus sources, the results obtained with pocl3 liquid