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光学散斑法是一种较新的表面粗糙度测量方法,因其非接触、面采样、装置简单等优点而得到广泛关注。为探讨光学散斑法工程应用的可行性,利用标准研磨样块对光学散斑法中的两种方法:散斑对比度法及空间平均散斑法进行了实验。结果表明,两种散斑法均可用于表面粗糙度测量,而空间平均散斑法给出了特征参数与表面粗糙度的严格定量关系,可得到更可靠的测量结果。
Optical speckle method is a new measurement method of surface roughness, which is widely concerned because of its advantages of non-contact, surface sampling and simple device. In order to explore the feasibility of optical speckle engineering application, two methods in optical speckle method, speckle contrast method and space-average speckle method, were tested by using standard polished specimens. The results show that both speckle methods can be used to measure the surface roughness, while the spatial average speckle method gives a strict quantitative relationship between the characteristic parameters and the surface roughness, and a more reliable measurement result can be obtained.