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利用射频溅射技术在一个单模玻璃光波导的局部表面淀积一层两端呈梯度的高折射率透明氧化物薄膜,形成低损失、高灵敏度平面复合光波导芯片。这种结构能够使得玻璃光波导内沿同一路径传播的横电基模(TE0)与横磁基模(TM0)在梯度薄膜区间产生纵向空间分离,导致TE0模的消逝场相比TM0模显著增强。利用复合光波导芯片,结合棱镜-样品池组合体和集成式选偏光探测器研制出基于偏振干涉测量的OWG-01型生化检测仪。对液体折射率响应的测试结果表明复合光波导芯片的热光效应非常小,而仪器的测量误差主要来自待测液体自身的折射率随温度的变化。
Using radio frequency sputtering technique, a layer of high refractive index transparent oxide film with a gradient at both ends is deposited on the local surface of a single-mode glass optical waveguide to form a low-loss and high-sensitivity planar composite optical waveguide chip. This kind of structure can make the transverse electric mode (TE0) and transverse magnetic mode (TM0) propagating along the same path in the glass optical waveguide have a longitudinal spatial separation in the gradient film region, resulting in a significant increase of the evanescent field of the TE0 mode compared with the TM0 mode . OWG-01 biochemical detector based on polarization interference measurement was developed by using composite optical waveguide chip, prism-sample cell combination and integrated polarization-selective detector. The test results of the liquid refractive index response show that the thermo-optic effect of the composite optical waveguide chip is very small, and the measurement error of the instrument mainly comes from the change of the refractive index of the liquid to be measured with temperature.