【摘 要】
：
Undoped and Al-doped 3C-SiC films are deposited on Si(lO0) substrates by low-pressure chemical vapour deposition. Effects of aluminium incorporation on crystaJl
【机 构】
：
Department of Physics, University of Science and Technology of China, Hefei 230026
论文部分内容阅读
Undoped and Al-doped 3C-SiC films are deposited on Si(lO0) substrates by low-pressure chemical vapour deposition. Effects of aluminium incorporation on crystaJlinity, strain stress, surface morphology and growth rate of SiC films have been investigated. The x-ray diffraction pattes and rocking curves indicate that the crystallinity is improved with aluminium doping. Raman scatting pattes also demonstrate that the strain stress in SiC films is released due to the incorporation of A1 ions and the increase of film thickness. Furthermore, due to the catalysis of surface reaction which is induced by trimethylaluminium, the growth rate is increased greatly and the growth process varies from three-dimensional island-growth mode to step-flow growth mode.
其他文献
The dynamics of the spin-boson model with an Ohmic bath at finite temperature is studied by a variational calculation. Numerical solution of the self-consistent
近年来,随着新课程改革的不断深入,如何培养学生的学习兴趣,努力打造“乐学、好学”的高效课堂成为众多教师探索新课改的奋斗目标.我在小学数学教学工作中总结了一些经验,下
随着新课改的不断深入,要求高中物理教师需改变传统的教学方法,积极开展情境教学,落实情境教学法,讲解物理课程时,便可依据教材内容提出多个问题,以此布置悬念,创设问题情境,
信息技术是未来社会发展的重要领域,也是实现人际协作、人工智能、大数据、云服务的基础.中学阶段处于学生学习发展、认知养成的关键阶段,教学中我们要采取科学的引导策略,联
随着我们万全区职业教育的飞速发展,我校广告学专业得到了社会的认可,近年来备受学生的青睐.本文中,笔者结合自己的教学实践,并结合教学现状分析现阶段我校广告学专业教育存
We investigate persistent charge and spin currents of a one-dimensional ring with Rashba spin-orbit coupling and connected asymmetrically to two exteal leads sp
小学语文课程标准总目标指出:学生要具有日常口语交际的基本能力,在各种交际活动中学会倾听、表达与交流,初步学会文明地进行人际沟通和社会交往,发展合作精神.因此,口语交际
A cascaded buffer based on nonlinear polarization rotation in semiconductor optical amplifiers is proposed, which is suitable for fast reconfiguration of buffer
在初中英语教学过程中,通守创设情境,可以有效的提高课堂效率和培养学生理解能力.在当前素质教育环境下,对于学生能力的要求不断提高,通过在英语教学中创设具的情境,可以有效
随着时代的不断发展,教学理念也在不断的变化,传统的教学理念已经不符合如今的时代发展了,新课改明确的提出了“自由、合作、创新”的学习理念,教师们在不断创新教学方法,其