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采用波长1064 nm Nd-YAG固态激光器对TC11牌号钛合金样品进行烧蚀,中阶梯光栅光谱仪作为分光系统,以时间分辨增强型电荷耦合检测器检测光信号,采用自由定标激光诱导击穿光谱(CF-LIBS)法对钛合金中Ti,Al,Mo及Zr等主量元素进行定量分析。为提高分析方法的准确度,以Ti(II)350.489 nm斯塔克展宽确定等离子体电子数密度,采用萨哈-玻尔兹曼平面法确定等离子体温度,通过CF-LIBS定量分析数学模型及算法,对4块钛合金标准样品中Ti,Al,Mo及Zr进行定量分析,并与标准值进行比较,其相对误差分别为1.6%~2.6%,5.5%~11%,13%~22%及26%~38%。结果表明,CF-LIBS可以快速实现对钛合金中主量元素的半定量分析。
The TC11 titanium alloy samples were ablated by a Nd: YAG solid-state laser with a wavelength of 1064 nm. The middle-stepped grating spectrometer was used as a spectrometer to detect the optical signal with a time-resolved enhanced charge-coupled detector. The free-guided laser-induced breakdown spectroscopy CF-LIBS) method for quantitative analysis of Ti, Al, Mo and Zr in titanium alloy. In order to improve the accuracy of the analytical method, the plasma electron number density was determined by Ti (II) 350.489 nm Stark broadening, the plasma temperature was determined by the Saha-Boltzmann plane method, the mathematical model was quantitatively analyzed by CF-LIBS and The relative errors of Ti, Al, Mo and Zr in four titanium alloy samples were compared and analyzed. The relative errors were 1.6% -2.6%, 5.5% -11%, 13% -22% And 26% to 38%. The results show that CF-LIBS can quickly achieve the semi-quantitative analysis of major elements in titanium alloys.