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对角多路准分子激光主振荡器功率放大(MOPA)系统进行物像共轭结构简化。利用传输矩阵和光线追迹,推导出了像传递光路中光学元件扰动与相应像面光束定位误差之间关系式。根据九标度赋值矩阵,采用改进层次分析法确定指标权重系数,得到了影响系统稳定性的光学元件光束定位指标要求。结果表明,光学元件分配指标大小和像传递结构焦距、光学元件(反射镜)距离像传递结构物面距离有关,焦距越大指标越小,距离越远指标越大。测量了实验室环境下光学元件的稳定性,对测量结果和定位误差进行了分析,并在此基础上提出了光路设计和光路优化的建议。
Diagonal multipath excimer laser main oscillator power amplifier (MOPA) system for image-like conjugate structure simplification. Using the transfer matrix and ray tracing, the relation between the perturbation of the optical element in the optical path of transmission and the positioning error of the corresponding image beam is deduced. According to the nine-scale assignment matrix, the improved analytic hierarchy process (AHP) method was used to determine the index weighting coefficient, and the optical element beam positioning index which affected the stability of the system was obtained. The results show that the index of optical components distribution and the focal length of the image transmission structure are related to the distance of the optical component (mirror) from the surface of the transmission structure. The larger the focal length is, the smaller the index is and the longer the distance is, the larger the index is. The stability of the optical components in the laboratory environment was measured. The measurement results and the positioning errors were analyzed. Based on this, the optical path design and optical path optimization were proposed.