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南京大学声学研究所和物理系于1981年研制成功我国第一台扫描光声显微镜并实现热波成象,整个装置全部采用国产元器件、设备和国内最新研究成果(例如:记忆示波器、闭环控制振镜系统,稳定度较高的Ar~+激光器及锁定放大器等),并于1982年1月通过鉴定,其主要指标线分辨率优于2μm,达到同类型装置的国际先进水平。已对集成电路和表面声波叉指换能器等进行成象观察,还对金属亚表面的人工缺损进行了非破坏性检测,说明本装置在研究集成电
Acoustical Institute of Nanjing University and Physics Department in 1981 successfully developed China's first scanning photoacoustic microscope and thermal imaging, the entire device using all the domestic components and devices and the latest research results (such as: memory oscilloscope, closed-loop control Galvanometer system, high stability Ar ~ + laser and lock-in amplifier, etc.) and passed the appraisal in January 1982. Its main indicator line resolution is better than 2μm, reaching the international advanced level of the same type of device. Integrated circuits and surface acoustic wave interdigital transducers have been observed for imaging and non-destructive detection of sub-surface metal defects, indicating that the device in the study of integrated circuits