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利用微细加工与MENS技术制造了一款微型气相色谱柱,在Pyrex型硼硅玻璃表面刻蚀出400μm的沟道,沟道总长度为5.8 m,均匀的以S形分布于硼硅玻璃芯片上。选用OV-17固定相对色谱柱进行涂敷,针对工业生产中排放的苯系物气体进行快速分离检测。设计了一整套的控制、采样、分离与检测系统,实现在线分离检测,选用灵敏度较高的PID(Photo Ionization Detector)光离子传感器作为终端检测器。精确的控制分离中的主要参数:温度与流量。针对分离苯系物气体混合物的特性,选取甲苯作为实验样本,通过温度与流量的变化实验找到最佳的分离条件参数。可以在10 min内对苯系物进行快速在线分析检测,对苯与甲苯等致癌气体的检测限达到0.523 mg/m~3和0.617 mg/m~3。
A miniature GC column was fabricated by microfabrication and MENS technology. A 400μm channel was etched on the Pyrex-type borosilicate glass with a total channel length of 5.8μm and was uniformly distributed in a S-shape on the borosilicate glass chip . Use OV-17 fixed relative to the column for coating, for the industrial production of benzene-based gas emissions for rapid separation testing. A complete set of control, sampling, separation and detection system is designed to realize on-line separation and detection. A high sensitivity PID (Photo Ionization Detector) photoionization sensor is selected as the terminal detector. Precise control of the separation of the main parameters: temperature and flow. Toluene was selected as the experimental sample for the separation of benzene series gas mixtures. The optimum separation conditions were found through the experiments on the change of temperature and flow rate. The detection limits of benzene series compounds such as benzene and toluene to 0.523 mg / m ~ 3 and 0.617 mg / m ~ 3 can be quickly determined online within 10 min.