在当今世界科学技术突飞猛进发展的时代,在新技术革命浪潮席卷着全世界的时刻,微电子技术的应用,正广泛地深入到生产和生活的各个方面,并以惊人的姿态改变着世界的面貌。微电子技术的应用是随着大规模集成电路制造工艺的进步而发展的。集成电路的密集度已由初期在一块微小的硅片上布置几百个元件发展到十万个以上元件,电路线条的宽度由十几微米正向小于一微米的目标进军。大规模及 In the era of rapid advancement of science and technology in the world today, the application of microelectronics technology has been deeply involved in all aspects of production and life, and has changed the face of the world in an astonishing attitude. . The application of microelectronics technology has evolved with the advancement of large-scale integrated circuit manufacturing processes. The density of integrated circuits has grown from a few hundred components on a tiny silicon wafer to more than 100,000 elements in the early stages, and the width of circuit lines has moved from a dozen microns to a goal of less than one micron. Large-scale and