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转轴为旋转运动提供了基准,是精密测量、加工、控制等设备的重要运动部件之一,在高端加工制造、航空航天、光学分析等领域具有重要地位。转轴在转动时具有六自由度几何运动误差,通过对六自由度误差的测量,建立误差补偿模型进行误差补偿,是目前世界上普遍采用的用于提高精密测量、加工、控制等设备精度的主要途径之一。综述了现有转轴激光多自由度误差测量方法,并分析了各种方法的优缺点,讨论了其发展趋势。
The shaft provides a benchmark for rotational movement and is one of the important moving parts for precision measurement, machining and control equipment. It plays an important role in high-end manufacturing, aerospace and optical analysis. The rotating shaft has six degrees of freedom geometric movement error during rotation. By measuring the error of six degrees of freedom and establishing the error compensation model for error compensation, it is the most commonly used in the world to improve the accuracy of precision measurement, processing and control equipment One of the ways. The existing measurement methods of laser multi-degree-of-freedom error are reviewed. The advantages and disadvantages of various methods are analyzed and the development trend is discussed.