六十年代中期,微带型混合集成晶体管放大器的出现,大大缩小了微波设备的体积,明显地提高了系统的可靠性,这为微波系统的性能改进与发展开辟了一条新的途径。但是,随着系统要求的提高,又要求放大器的体积进一步缩小,并要求更高的生产成品率和更低的成本,于是集成晶体管放大器的小型化,就沿着两条道路正在发展。一是比较彻底的抛弃混合集成的概念,而是在制作有源器件的半导体材料上,直接将电路一起集成,这就是当前称之 In the mid-1960s, the advent of microstrip hybrid integrated transistor amplifiers greatly reduced the size of microwave equipment and significantly improved system reliability, opening up a new avenue for the performance improvement and development of microwave systems. However, with the increase of system requirements, the amplifier needs to be further reduced in size and requires higher production yield and lower cost. Therefore, the miniaturization of the integrated transistor amplifier is going along two paths. First, a more complete abandon the concept of hybrid integration, but in the production of active semiconductor materials, the direct integration of the circuit, which is currently called