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Fe Ni42Cr6A1合金是与电真空软玻璃封接的材料,带材表面的氧化膜质量直接影响封接强度,气密性和可靠性。本文采用几种方法研究带材表面的氧化膜,用用称重法测定合金的氧化增量曲线属抛物线型;用俄歇电子能谱分析、离子探针和二次离子质谱分析氧化膜中合金元素相对浓度的变化和微量合金元素的存在,用X光衍射分析氧化膜结构是以Cr_2O_3为主尖晶石型复合氧化物,用扫锚电镜能谱分析带材表面氧化膜为富Cr含Mn、Fe氧化物,楔入基体的晶界为富Si含Cr、Mn、Fe的氧化物,内氧化区质点为富Cr、Mn界面上Si的聚集。就合金带材表面状态和氧化处理工艺进行试验得出,提高带材表面的光洁度有利于生成均匀,致密、连续的氧化膜,氧化处理工艺直接影响氧化膜和基体的结合形态。
Fe Ni42Cr6A1 alloy is electrically vacuum soft glass sealing material, the strip surface oxide film quality directly affect the sealing strength, air tightness and reliability. In this paper, several methods were used to study the oxide film on the surface of the strip. The oxidation increment curve of the alloy was measured by the gravimetric method. The oxidation increment curve was parabolic. The Au-oxide alloy was analyzed by Auger electron spectroscopy, ion probe and secondary ion mass spectrometry The relative concentration of elements and the existence of trace alloying elements, X-ray diffraction analysis of the oxide film structure is based Cr_2O_3-based spinel composite oxide, scanning electron microscopy analysis of the strip surface oxide film is Cr-rich Mn , Fe oxide. The grain boundaries of wedged matrix are Si-rich oxides containing Cr, Mn and Fe. The content of Si in the inner oxidation zone is rich in Cr and Mn. The test of the surface condition and the oxidation process of the alloy strip shows that improving the surface finish of the strip is favorable for producing a uniform, dense and continuous oxide film, and the oxidation treatment process directly affects the bonding morphology of the oxide film and the matrix.