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碳化硅光学反射镜已经在国民生活各个领域得到广泛应用,但是其抛光机理尚不明确。对碳化硅光学表面抛光机理进行了研究。介绍了陶瓷材料的磨削机理——压痕断裂模型。应用压痕断裂模型分析了理想状态下的碳化硅抛光过程,并研究了实际抛光过程中碳化硅光学表面的抛光机理。
Silicon carbide optical mirrors have been widely used in various fields of national life, but the mechanism of polishing is unclear. Silicon carbide optical surface polishing mechanism was studied. The grinding mechanism of ceramic materials - indentation fracture model is introduced. The indentation fracture model was used to analyze the silicon carbide polishing process under ideal conditions and to study the polishing mechanism of the silicon carbide optical surface in the actual polishing process.