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论述了一种模拟电荷法与镜像格林函数法相结合 ,对模拟电荷用 DFP法进行最优设置的提取双介质 UL SI互连电容参数的基本算法 ,并与其它互连电容模拟软件模拟的结果进行了比较 ,相对偏差小于 10 % ,表明这种新的模拟电荷法是有效的和可行的
In this paper, a basic algorithm for extracting two-medium UL SI interconnection capacitance parameters based on analog charge method and mirror green function method is proposed. The simulation results of other interconnection capacitance simulation software In comparison, the relative deviation is less than 10%, indicating that this new analog charge method is effective and feasible