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研制了一种新型环振式数字压力传感器,它可应用于汽车轮胎压力监测报警系统(TPMS)。采用硅薄膜上的PMOS环形振荡器作为压力敏感元件,两个反方向变化的环振输出信号通过集成在片内的混频器实现频率相减。该传感器具有准数字输出、温度系数低、灵敏度高以及制作工艺简单等特点。分析并设计了压力传感器的环形振荡器电路、混频器电路、物理结构。分析了环形振荡器的频率特性、环形振荡器的谐振频率与压力的关系,以及制作工艺,并制作了样品,其灵敏度为5.12 kHz/Bar。
A new type of ring vibration digital pressure sensor is developed, which can be applied to the tire pressure monitoring alarm system (TPMS). Using a PMOS ring oscillator on a silicon thin film as a pressure sensitive element, two oppositely-varying ringing output signals are frequency-subtracted by a mixer integrated in the chip. The sensor has a quasi-digital output, low temperature coefficient, high sensitivity and the production process is simple and so on. The ring oscillator circuit, mixer circuit and physical structure of pressure sensor are analyzed and designed. The frequency characteristics of the ring oscillator, the relationship between the resonance frequency of the ring oscillator and the pressure, the manufacturing process and the sample were analyzed. The sensitivity was 5.12 kHz / Bar.