由于零件表面的污物组分复杂,真空电子器件,如CPT、CDT用的销钉、阳极帽等零件原来全部采用ODS溶剂清洗。为获得极洁净的表面,本文介绍一种非ODS水剂清洗技术。其清洗剂主要组分包括脂肪醇聚氧乙烯醚、烷基醇酰胺等多种表面活性剂和助剂,符合对人无毒、对环境无毒、对臭氧层无损耗、不含磷酸盐及壬基苯酚乙基盐等综合要求。对清洗过的零件,进行常规检验和X射线能谱分析的结果表明,非ODS水剂清洗工艺的清洗能力和漂洗性能都相当于或优于原TCA清洗工艺 Due to the complexity of the dirt components on the surface of the parts, vacuum electronics, such as CPT, pins for CDT, anode caps and other parts, were all originally cleaned with ODS solvent. In order to obtain a very clean surface, this article describes a non-ODS liquid cleaning technology. The main components of the cleaning agent include various surfactants and auxiliary agents such as fatty alcohol polyoxyethylene ether and alkyl alcohol amide, which are non-toxic to human beings, non-toxic to the environment, non-toxic to the environment, non-harmful to the ozone layer, Phenol ethyl salt and other comprehensive requirements. The results of routine inspection and X-ray energy spectrum analysis on the cleaned parts showed that the cleaning ability and rinsing performance of the non-ODS liquid cleaning process are equal to or better than the original TCA cleaning process