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描述了光刻胶喷雾显影和搅拌显影中线宽加工的工艺线自动控制方法。所使用的设备也可用于工艺诊断,评价诸如光刻胶溶解速率或显影实际开始前的初始时间一类的光刻胶参数。讨论了这种方法对于光刻胶的全自动处理的意义。
The method of automatic control of process line for photoresist blanket development and line width processing in agitating development is described. The equipment used can also be used for process diagnostics, evaluating photoresist parameters such as resist dissolution rate or initial time before development actually begins. The significance of this method for fully automated processing of photoresists is discussed.