由于受到建筑空间的限制,在光路末端需要将束流偏转90°打靶,因此所需要的光路元件较多,其空间安排和线性光路包络如图1所示。其中24和30为45°偏转磁铁,其余为四极磁铁。首先利用TRACE3D程序进行线性光路的匹配计算,然后利用LEADS程序进行非线性束流均匀化计算。图2为TRACE3D的计算结果,图3～5为LEADS程序的计算结果。束斑均匀化采用 Due to the limitation of the building space, the beam needs to be deflected by 90 ° at the end of the optical path so that more optical components are needed. The spatial arrangement and linear optical path envelopment are shown in FIG. 1. Among them, 24 and 30 are 45 ° deflection magnets, the rest are quadrupole magnets. Firstly, the matching of linear optical path is calculated by using TRACE3D program, then the LEADS program is used to calculate the nonlinear beam homogeneity. Figure 2 shows the calculation results of TRACE3D, and Figures 3 to 5 show the calculation results of LEADS program. Beam spot uniform use