本文简要评述砷乳胶源的应用技术,讨论了控制表面损伤及获得浅结高浓度砷的某些重要因素,介绍该技术在高频功率器件上应用的实例. This article briefly reviews the application techniques of arsenic latex sources, discusses some important factors that control surface damage and obtain high concentration of arsenic in shallow junctions, and introduces the application of the technology to high frequency power devices.