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降低自旋阀薄膜矫顽力对于制作巨磁电阻(GMR)传感器非常重要。报告了利用退火方法降低自旋阀薄膜矫顽力的实验结果,介绍了数值模拟退火的条件和方法,借助计算机对退火实验的条件及其实验结果进行了模拟。结果表明,模拟后的结果可以用来进一步优化退火条件,并不再需要做大量退火实验。使用优化后的退火条件大大降低了自旋阀薄膜的矫顽力同时可保持自旋阀的磁电阻变化率(MR)在较高的水平。介绍了不同退火参数下的模拟实验,结果显示退火前样品的的矫顽力为358.2 A/ m、MR为9.24%,退火后其分别降到3.18 A/ m和8.54%,表明数值模拟方法可以较好地拟合自旋阀薄膜的退火条件及实验结果,并有助于优化退火条件。
Reducing the coercive force of the spin-valve film is very important for the fabrication of giant magnetoresistive (GMR) sensors. The experimental results of using the annealing method to reduce the coercive force of the spin-valve film are reported. The conditions and methods of numerical simulation annealing are introduced. The annealing conditions and the experimental results are simulated by computer. The results show that the simulation results can be used to further optimize the annealing conditions, and no longer need to do a large number of annealing experiments. The use of optimized annealing conditions greatly reduces the coercive force of the spin-valve film while maintaining the spin-on rate (MR) of the spin-on valve at a high level. The simulations under different annealing parameters are introduced. The results show that the coercivity of the sample before annealing is 358.2 A / m, MR is 9.24%, and it decreases to 3.18 A / m and 8.54% respectively after annealing, indicating that the numerical simulation method can Good fit spin-valve film annealing conditions and experimental results, and to help optimize the annealing conditions.