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提出了一种新的光束质量M2因子实时检测技术,利用一个普通正交衍射光栅组将一束待测激光束分成3×3共9路光,并利用光路调整器使9路光束通过不同的光程后有序地排列在CCD相机的探测面上,并使得各路光的光程差分布在束腰附近两倍瑞利距离内,从而可利用单一CCD探测面来同时获取待测光束多个位置上的光斑图样,再利用二阶矩理论求出各个位置上的光束束宽,通过曲线拟合进而实现光束质量的实时检测。结果表明,对于连续He-Ne激光器的输出光束,采用实时检测技术得到的测量结果与用传统方法得到的结果基本一致。
A new real-time detection technique of beam quality M2 factor is proposed. By using a normal orthogonal diffraction grating group, a laser beam to be measured is divided into 3 × 3 total 9 channels, and 9 optical channels are passed through different optical channels After the optical path, an orderly arrangement is made on the detection surface of the CCD camera, and the optical path difference of each path is distributed within twice the Rayleigh distance near the beam waist. Therefore, a single CCD detection surface can be used to simultaneously acquire the light beam to be measured Then the second beam theory is used to find out the beam width at each position, and the real-time detection of the beam quality can be realized by curve fitting. The results show that, for the output beam of a continuous He-Ne laser, the measurement results obtained by real-time detection technology are basically the same as those obtained by the traditional method.