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讨论了离子束辅助沉积技术在真空沉积过程中的应用原理。通过与常规的热蒸发工艺镀制的膜层相比较 ,证实了离子束辅助沉积技术有助于提高钼酸铅晶体表面红外增透膜的膜层品质及中心波长位置的精确度。
The application principle of ion beam assisted deposition technology in vacuum deposition is discussed. The ion beam assisted deposition technique has been demonstrated to improve the quality of the film and the accuracy of the central wavelength position of the AR coating on the lead molybdate crystal surface by comparison with that of a conventional thermal evaporation process.