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纳流控芯片可以通过控制电极产生的场致效应对生物大分子的运动进行操纵,在痕量生物分子的探测、分离与富集等方面,具有广阔的应用前景。本文依据生物分子操纵芯片的结构和功能,设计并绘制了芯片电极的结构模型;利用ANSOFT软件对芯片控制电极进行静电场分析,并根据模拟结果对芯片电极图案进行了优化;采用磁控溅射方法,结合设计加工的掩模,直接在玻璃纳流控芯片背面沉积了芯片控制电极图案,成功制备了生物分子操纵芯片的控制电极。实验结果表明,采用结构优化分析、借助掩模直接磁控溅射制备玻璃纳流控芯片背电极,缩短设计周期、简化制作工艺,满足芯片控制电极的功能设计需求,是一种简便有效的设计与制备纳流控芯片的方法。
The nanofluidic chip can control the movement of biological macromolecules by controlling the field effect generated by the electrodes and has broad application prospect in the detection, separation and enrichment of trace biological molecules. Based on the structure and function of the biomolecule manipulation chip, the structure model of the chip electrode was designed and drawn. The ANSOFT software was used to analyze the electrostatic field of the chip control electrode, and the electrode pattern of the chip was optimized according to the simulation result. Method, combined with the design and processing of the mask, directly on the glass flow control chip deposited on the back of the chip control electrode pattern, the successful preparation of the biomolecule manipulation chip control electrode. The experimental results show that it is a simple and effective design to fabricate glass nanoflow control chip back electrode by means of structural optimization analysis and mask direct magnetron sputtering to shorten the design cycle and simplify the fabrication process to meet the functional design requirements of the chip control electrode And method for preparing nanofluidic chip.