一、概述在工业生产过程及自动控制系统中,需要对温度、流速、流量、湿度、气氛、压力等各种外界物理量进行检测,控制。随着以微处理机为基础的信息处理技术的发展,对各种物理参数的检测要求越来越高,检测范围越来越广,因而对具有响应被检测信息和转换功能的传感元器件的要求也越来越高。随着生产过程中被检测、控制的物理参数的增加,人们在不断开发各种类型的高精度单 First, an overview In the industrial process and automatic control system, the need for temperature, flow rate, flow, humidity, atmosphere, pressure and other external physical detection, control. With the development of microprocessor-based information processing technology, the detection requirements of various physical parameters are getting higher and higher, and the detection range is wider and wider. Therefore, the sensing components having response to detected information and conversion functions The requirements are also getting higher and higher. As the production process is being tested, the control of the physical parameters increase, people are constantly developing various types of high-precision single