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本文详尽地分析了VPS60型溅射离子泵的故障诊断及调试方法。将原电路整理简化为测量电路,保护、遥控电路及电源电路三大部分。在此基础上举出故障分析判断及排除事例,并总结了电路调整步骤。
This article detailed analysis of the VPS60 sputtering ion pump fault diagnosis and debugging methods. The original circuit simplifies the measurement circuit, protection, remote control circuit and power circuit three parts. Based on this, we give examples of fault analysis and troubleshooting, and summarize the circuit adjustment steps.