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本文系统地介绍了核靶厚度和均匀性的测量方法,包括天平称重法、石英晶体测厚法,等效空气α粒子能量损失法,吸光光度法和离子背散射法。这些方法都有各自的特点:石英微量天平的灵敏度高(0.04μg/cm~2);等效空气α粒子测厚仪的测量范围宽;吸光光度法测量快速而背散射法既能测量核靶厚度又能分析靶膜的杂质。将这几种方法结合起来,就能测量不同元素和不同种类核靶的厚度和均匀性。
This paper systematically introduced the measurement method of nuclear target thickness and uniformity, including balance weighing method, quartz crystal thickness measurement, equivalent air α particle energy loss method, absorptiometry and ion backscattering method. These methods have their own characteristics: the sensitivity of the quartz microbalance is high (0.04μg / cm ~ 2); equivalent air α particle thickness gauge measuring range; spectrophotometry fast and backscattering both nuclear targets Thickness can analyze the target membrane impurities. By combining these methods, the thickness and uniformity of different elements and different types of nuclear targets can be measured.