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研究了氮流量对磁控溅射Fe-N薄膜的磁性和结构的影响.加氮薄膜的软磁性能明显优于纯铁的.当氮的流量为1.0mL·min~(-1)时,矫顽力 H_c达到最小值205A/m.当氮流量为0.8mL·min_(-1)时,饱和磁化强度达到M_s=2.36T.在 Fe-N薄膜中未发现γ’-Fe4N和 α”-Fe16N2.
The effect of nitrogen flow on the magnetism and structure of magnetron sputtering Fe-N thin films was investigated. The soft magnetic properties of nitrogen-added thin films are significantly better than that of pure iron. When the flow rate of nitrogen is 1.0mL · min ~ (-1), the coercivity Hc reaches the minimum of 205A / m. When the nitrogen flow rate is 0.8mL · min _ (- 1), the saturation magnetization reaches M_s = 2.36T. No γ’-Fe4N and α "-Fe16N2 were found in Fe-N films.