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研究了氮流量对磁控溅射Ｆｅ－Ｎ薄膜的磁性和结构的影响．加氮薄膜的软磁性能明显优于纯铁的．当氮的流量为１．０ｍＬ·ｍｉｎ~（－１）时，矫顽力 Ｈ_ｃ达到最小值２０５Ａ／ｍ．当氮流量为０．８ｍＬ·ｍｉｎ_（－１）时，饱和磁化强度达到Ｍ_ｓ＝２．３６Ｔ．在 Ｆｅ－Ｎ薄膜中未发现γ’－Ｆｅ４Ｎ和 α”－Ｆｅ１６Ｎ２．
The effect of nitrogen flow on the magnetism and structure of magnetron sputtering Fe-N thin films was investigated. The soft magnetic properties of nitrogen-added thin films are significantly better than that of pure iron. When the flow rate of nitrogen is 1.0mL · min ~ (-1), the coercivity Hc reaches the minimum of 205A / m. When the nitrogen flow rate is 0.8mL · min _ (- 1), the saturation magnetization reaches M_s = 2.36T. No γ’-Fe4N and α "-Fe16N2 were found in Fe-N films.