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利用离散Green函数和有限元等方法对在64°YX-LiNbO3基片上铜短路金属栅阵中漏表面波的传播特性进行了理论研究。给出了不同厚度铜栅条引起的声表面波的色散关系和Coupling-of-Modes耦合模(COM)参数,对其色散特性进行了分析。为研制相应的声表面波器件提供理论支持。
The propagation characteristics of the surface acoustic wave leakage in a copper short circuit metal grid array on a 64 ° YX-LiNbO3 substrate are studied theoretically by means of discrete Green’s function and finite element method. The dispersion relationship of SAW and the Coupling-of-Modes coupling mode (COM) parameters due to the different thicknesses of copper bars are given, and their dispersion characteristics are analyzed. Provide theoretical support for the development of the corresponding SAW devices.