提出一种利用收集极在三维空间内通过束流采样进行电子注分析的测量方法，介绍了电子注分析系统中三坐标精密移动工作台的设计与控制。该方法可对电子注发射系统的结构参数、工作性能进行全面测量和分析，为超高频大功率电子器件的研制提供实验手段。 A measuring method based on beam sampling in electron beam injection in three-dimensional space is proposed. The design and control of the three-coordinate precision moving table in the electronic injection analysis system are introduced. The method can fully measure and analyze the structural parameters and working performance of the electron injection and injection system and provide experimental means for the development of ultrahigh frequency high power electronic devices.