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对纳米级测量系统进行标定是一个难题。结合某一外差干涉测量系统,提出了一个对测量系统的分辨力、输入输出特性进行标定的简单易行的方法。
Calibrating nanoscale measurement systems is a challenge. Combined with a heterodyne interferometry system, a simple and easy method to calibrate the resolution, input and output characteristics of the measuring system is proposed.