Analysis on contact and flow features in CMP process

来源 :Chinese Science Bulletin | 被引量 : 0次 | 上传用户:toon126
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
Contact pressure and flow features of chemical mechanical polishing/planarization (CMP) process were analyzed,taking advantage of the one-dimensional contact model of two layers and considering slurry flows. In this model,deformations of the bulk pad substrate and the asperities were considered. The deformations of the bulk pad sub- strate and the asperity layer,as well as the contact pressure and fluid pressure,were revealed with nu- merical methods. Numerical simulation results show a counterintuitive phenomenon: a diverging clear- ance is formed in the leading region of the wafer and thereby it gives rise to a suction pressure (subambi- ent pressure). A high stress concentration is pre- sented at the wafer edge and thereby over polishing can be introduced. The research provides some theoretical explanations for these two fundamental features of usual CMP processes. Contact pressure and flow features of chemical mechanical polishing / planarization (CMP) process were analyzed, taking advantage of the one-dimensional contact model of two layers and considering slurry flows. In this model, deformations of the bulk pad substrate and the aspersities were considered . The deformations of the bulk pad sub- strate and the asperity layer, as well as the contact pressure and fluid pressure, were revealed with nu-merical methods. Numerical simulation results show a counterintuitive phenomenon: a diverging clear- ance is formed in the leading region of the wafer and therefore it gives rise to a suction pressure (subambi ent pressure). A high stress concentration is pre- sented at the wafer edge and therefore over polishing can be introduced. The research provides some theoretical explanations for these two fundamental features of usual CMP processes.
其他文献
新型农村合作医疗制度是构建和谐社会、加快推进社会主义新农村建设的重要战略举措,是解决广大农民群众因病致贫、因病返贫这一突出问题的重要途径。为了促进这项惠民工程的
本文所讲的熨平经济周期是指政府运用政策手段防止和消除经济的大起大落,减轻济波动,既要防止经济过热,抑制通货膨胀,又要减少失业,克服经济萧条,保证经济稳定、持续增长。这就要求
The nanocrystalline TiO2 film electrodes were prepared by sol-gel method at different calcin-ing temperatures, which had characteristics of dif-ferent film thic
本文用新酸性染料四碘酚磺酞测定了五种不同分配率的胺类药物,对影响生成酸性染料—胺配合物的主要因素,如萃取介质pH的影响、试剂用量和试剂空白值降低等进行了研究。用该法
本文观察呋喃唑酮(F)对半胱胺大鼠溃疡模型肾上腺NE和DA含量的影响。发现F可以保护半胱胺溃疡,使溃疡发生率自87.50%下降至28.57%;半胱胺有降低肾上腺髓质NE含量的倾向,并明显
1892年Preiffer首先提出内毒素(Endo-toxin)概念,但对它的化学本质是脂多糖(LPS)直到1952年才由wesstphal等证实为革兰氏阴性菌及其它微生物,如衣原体、立克次氏体、螺旋体
据人民网报道,5月13日,受困台湾同胞的消息陆续传来:台湾滞留在四川的旅行团游客数2897人,有6人失去联系;有28位台湾游客被困在都江堰至汶川友谊隧道中,寻求救援;有11名台湾
发现心血管类药物(如洋地黄)引起心律失常已有上百年历史.在抗心律失常药物应用于临床的几十年里,它们的致心律失常作用时有发生.20年代便发现奎尼丁可引起短暂的室速或室颤
硫酸核糖霉素是一种广谱低毒的氨基糖甙类抗生素。给药方式主要是肌注,其剂型多为冻干粉。为了便于推广生产,我们仿照日本药局标准试制注射液,现报告如下。 Ribulomycin su
生理学基础人们已了解生精过程的激素调控机理,睾丸内高浓度的睾酮是完成生精过程所必需的.睾酮从间质细胞经局部扩散到达精小管,而间质细胞处于垂体前叶分泌的促黄体生成激