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在氦氖激光器制作过程中,真空系统的好坏和管内所充气体的纯净程度,对器件的性能和寿命有着直接的影响。目前我们所用的氦氖气体的纯度虽为99.99％,但由于某些储气瓶除气程度差,这样在氦氖激光管中所含杂质气体的分压强大约在10~(-4)托,其有害成分的分压强有可能在10~(-5)托。因此我们在排气时,真空系统的静态真空度,在一定的时间内总保持在10~(-5)托以上。过去我们的真空系统采用机械泵和扩散泵,充气时系统的动态真空度为2×10~(-5)托,但实际静态真空度在很短时间内下降到5×10~(-4)托。
In the process of making He-Ne laser, the quality of the vacuum system and the purity of gas inflated in the tube have a direct impact on the performance and lifetime of the device. At present, although the purity of helium-neon gas we use is 99.99%, the partial pressure of the impurity gas contained in the He-Ne laser tube is about 10-4 Torr due to the poor degassing degree of some cylinders, The harmful components of the partial pressure may be 10 ~ (-5) care. Therefore, when we exhaust, the vacuum system of the static vacuum, in a certain period of time always maintained at 10 ~ (-5) care above. In the past, our vacuum system adopted a mechanical pump and a diffusion pump. The dynamic vacuum degree of the system was 2 × 10 -5 Torr when inflated, but the actual static vacuum degree decreased to 5 × 10 -4 in a very short time. Care