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介绍了无需吸收系数的新的X射线衍射测厚方法,将此方法在D/max-3CX射线衍射仪上实施,检测限可达2μm以下,灵敏度为1.6×10~(-??)/μm.
A new method of X-ray diffraction measurement without absorption coefficient was introduced. The method was implemented on a D / max-3CX diffractometer. The detection limit was up to 2μm and the sensitivity was 1.6 × 10 ~ (- .