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从集总参数模型出发 ,分析了热敏电阻型热探针的热传导机制和热物性测量机理 ,说明了扫描热探针的信号与样品表面温度 ,样品与探针间的热阻以及样品热导率等因素有关 .在不同的工作条件下 ,可用以进行表面的温度分布和局域热导分布等热参数的测量 .把扫描热显微镜用于半导体激光器结区温度分布和室温下热桥样品的实际测量 ,得到的热象图提供了亚微米尺度的热参数信息
Based on the lumped parameter model, the thermal conduction mechanism and thermophysical properties of the thermistor-based thermal probe are analyzed. The signal of the thermal probe and the surface temperature of the sample, the thermal resistance between the sample and the probe, and the thermal conductivity of the sample Rate and other factors.Under different working conditions, it can be used to measure the surface temperature distribution and local thermal conductivity distribution and other thermal parameters.Using scanning thermal microscope for junction temperature distribution of semiconductor laser junction and thermal bridge samples at room temperature The actual measurement, the resulting thermogram provides thermal parameters of sub-micron scale information