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提出高温有氧环境下介电性能测试方案,并对多孔Si3N4材料进行了7~18GHz高温有氧介电性能测试,得到了相应的随温度和频率变化数据及曲线。结果表明测试方案有效可行,测试结果可见,在7~18GHz频段,测试频率对多孔Si3N4材料的介电性能测试结果无明显影响。同时,在升温过程中,介电常数逐渐增加,增幅不大;损耗角正切增加较快,这与高温电子电导损耗及杂质离子电导损耗增大有关。
A scheme of dielectric properties testing under high temperature and aerobic environment was proposed. The porous Si3N4 material was tested for its high temperature aerobic performance at 7 ~ 18GHz. The corresponding temperature and frequency curves and curves were obtained. The results show that the test scheme is effective and feasible. The test results show that the test frequency has no obvious effect on the dielectric properties of porous Si3N4 material in the frequency range of 7 ~ 18GHz. At the same time, the dielectric constant increases gradually with a small increase and the loss tangent increases rapidly, which is related to the increase of high-temperature electron conductivity loss and impurity ion conductivity loss.