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磁悬浮系统是开环不稳定的强非线性系统。为了提高机床磁悬浮系统的悬浮精度,该文结合反馈线性化方法和干扰观测器补偿对磁悬浮系统进行精确线性化。对磁悬浮系统反馈线性化误差进行了分析,建立了磁悬浮系统反馈线性化误差模型。设计了干扰观测器,并分析了干扰观测器对反馈线性化误差的补偿作用,最后进行了实验研究。研究表明:干扰观测器能够有效补偿反馈线性化误差,获得精确线性化模型。实验结果表明:磁悬浮进给系统的磁悬浮工作台实现了精确线性化,工作台悬浮精度大幅度提高,达到μm级精度。
Maglev systems are open-loop unstable nonlinear systems. In order to improve the levitation accuracy of the magnetic levitation system of the machine tool, this paper combines the feedback linearization method with the disturbance observer compensation to precisely linearize the levitation system. The feedback linearization error of the magnetic suspension system is analyzed, and the feedback linearization error model of the magnetic suspension system is established. The disturbance observer is designed, and the compensating effect of the disturbance observer on the feedback linearization error is analyzed. Finally, experimental research is carried out. The results show that the disturbance observer can effectively compensate the feedback linearization error and get the accurate linearization model. The experimental results show that the magnetic levitation table of the levitation feeding system achieves accurate linearization, and the levitation precision of the working table is greatly improved to achieve the micrometer accuracy.