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现代电子显微学的发展,电子束直径可以小到几个nm,因此,透射电镜带能谱可以分析直径小到10～20nm的第二相质点的成分。这是用电子探针和扫描电镜不可能做到的。本文用此方法分析了三种高温合金中的四种小尺度(20—100nm)金属间化合物的成分四种相是GH901合金中的η相,GH169合金中的δ—Ni_3Nb相和γ″相,和U—700合金(含Co13.98％)中的γ相。试验是在透射电镜EM400T和能谱仪EDAX9100上进行的,电子束斑直径为4nm,加速电压为100kV,用两种方法试验,一种是采用萃取复型样品,这种方法可以避免基体成分的影响。另一种方法是在金属薄膜上,直接测
The development of modern electron microscopy, the electron beam diameter can be as small as a few nm, so the transmission electron microscopy with energy spectrum can be as small as 10 ~ 20nm diameter of the second phase particles of the composition. This is impossible with electron microprobe and SEM. In this paper, the four phases of four small scale (20-100nm) intermetallic compounds in three superalloys are analyzed. The four phases are η phase in GH901 alloy, δ-Ni_3Nb phase and γ "phase in GH169 alloy, And the γ phase in the U-700 alloy containing 13.98% Co The experiments were carried out on a transmission electron microscope EM400T and an energy dispersive spectrometer EDAX9100 with an electron beam spot diameter of 4 nm and an accelerating voltage of 100 kV, One is the use of complex sample extraction, this method can avoid the impact of the matrix composition.Other method is the metal film, direct measurement