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以照象法制造彩色显象管黑色矩阵屏时,为获得三基色彩色点或彩色条,需对光致抗蚀层进行三次曝光。在此过程中,光致抗蚀层被照区域会出现一定程度的重叠现象。这种重叠现象往往造成最终形成的黑色矩阵孔眼发生畸变。为了避免畸变,需使用一种倒易律失效抗蚀剂。这种抗蚀剂的感光性随光强减弱而迅速降低。 为了制备这种可溶于水的光致抗蚀剂,研究了含有聚合物、二叠氮化物的各种系统的光致交联特性。结果发现一种含聚丙烯酰
To create a color picture tube black matrix screen by photographic methods, three exposures of the photoresist layer are required to obtain a trichromatic color dot or color bar. During this process, there is a certain degree of overlap in the exposed areas of the photoresist. This overlap often results in distortions in the resulting black matrix apertures. To avoid distortion, a reciprocal law failure resist is used. The sensitivity of this resist decreases rapidly with decreasing light intensity. To prepare such a water-soluble photoresist, the photocrosslinking properties of various systems containing polymers, diazides were investigated. As a result, it was found that polyacrylamide was contained